Master wafer, method of manufacturing the same, and method of manufacturing optical device by using the same

Authors

Joonyong Park, Dongouk Kim, Jihyun Bae, Bongsu Shin, Jong G. Ok, Ilsun Yoon, Sunghoon Lee, Jaeseung Chung, Sukgyu Hahm

Journal

US patent

Vol

granted; US 10007124 B2

Year

Patents

Link

https://patents.google.com/patent/US10007124B2